SAN JOSE, Calif. &#151 Continuing on its collision course with Applied Materials Inc., rival KLA-Tencor Corp. is making a new bid in the defect review and classification equipment market. KLA-Tencor ...

Several companies are developing or shipping next-generation e-beam inspection systems in an effort to reduce defects in advanced logic and memory chips. Vendors are taking two approaches with these ...

SAN JOSE–KLA-Tencor Corp. today announced it was offering the industry's first inline, non-contact system for monitoring electrical defects in processed wafers. The metrology giant claimed the new ...

In summer 2020, KLA Corporation announced the formation of KLA Instruments™, a group that develops, markets and services measurement and defect inspection systems that are used primarily by research ...